Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312013(2023)
Surface Topography Measurement Technology Based on Optical Frequency Comb
Surface topography measurement is one of the key technologies for industrial production and scientific research, and the pursuit of high accuracy and high efficiency has always been the direction of the field. With its unique broad spectrum, narrow linewidth, and stable frequency characteristics, optical frequency combs show superior metrology potential and have been developed for a variety of topography measurement techniques. First, the definition of optical frequency combs is introduced; the current research status and characteristics of optical frequency combs in topography measurement are categorized and reviewed according to different technical lines; finally, the outlook of optical frequency comb-based topography measurement techniques is presented.
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Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013
Category: Instrumentation, Measurement and Metrology
Received: Dec. 17, 2022
Accepted: Jan. 6, 2023
Published Online: Feb. 22, 2023
The Author Email: Wu Guanhao (guanhaowu@mail.tsinghua.edu.cn)