International Journal of Extreme Manufacturing, Volume. 4, Issue 1, 15103(2022)
Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)
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Francesc Caballero-Lucas, Kotaro Obata, Koji Sugioka. Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)[J]. International Journal of Extreme Manufacturing, 2022, 4(1): 15103
Paper Information
Received: Sep. 3, 2021
Accepted: --
Published Online: Jan. 22, 2023
The Author Email: Sugioka Koji (ksugioka@riken.jp)
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