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Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312014(2023)

Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology

Jiao Bai1, Jingwen Li2, Xiaohao Wang2, and Xinghui Li2,3、*
Author Affiliations
  • 1Institute of Materials, China Academy of Engineering Physics, Jiangyou 621908, Sichuan, China
  • 2Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong, China
  • 3Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, Guangdong, China
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    Article index updated:May. 24, 2024

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    Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li. Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312014

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 30, 2022

    Accepted: Oct. 27, 2022

    Published Online: Feb. 14, 2023

    The Author Email: Li Xinghui (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.3788/LOP222679

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology