Optics and Precision Engineering, Volume. 29, Issue 9, 2108(2021)
Verification of redeposition correction in focused ion beam milling by cellular automaton
Fig. 1. Schematic of ion sputtering where
Fig. 8. Schematic of sidewall sections before and after SLAS correction
Fig. 9. Evolution of trenches upon gradual approaching of single-pixel lines to central area
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Jie CHEN, Bang-jun MA, Xiao-long WANG, Tian HAN, Jun-sheng LIAO. Verification of redeposition correction in focused ion beam milling by cellular automaton[J]. Optics and Precision Engineering, 2021, 29(9): 2108
Category: Micro/Nano Technology and Fine Mechanics
Received: Nov. 13, 2020
Accepted: --
Published Online: Nov. 22, 2021
The Author Email: CHEN Jie (13981116015@163.com)