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Semiconductor Optoelectronics, Volume. 41, Issue 4, 517(2020)

Effects of Preionization on Properties of ArF Excimer Laser

SU Dan1...2,3, ZHAO Jiangshan1,2,3,*, and WANG Qian1,23 |Show fewer author(s)
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    SU Dan, ZHAO Jiangshan, WANG Qian. Effects of Preionization on Properties of ArF Excimer Laser[J]. Semiconductor Optoelectronics, 2020, 41(4): 517

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    Received: Jan. 2, 2020

    Accepted: --

    Published Online: Aug. 18, 2020

    The Author Email: Jiangshan ZHAO (zhaojiangshan@aoe.ac.cn)

    DOI:10.16818/j.issn1001-5868.2020.04.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology