Fig. 1. The structure of the fiber optic cantilever sensor

Fig. 2. The relationship of microcantilever structure parameters and sensitivity

Fig. 3. Schematic of the structure of the cantilever beam thin film surface

Fig. 4. Schematic of the orthogonal working point with direct measurement method

Fig. 5. Micro-cantilever fiber optic sensing demodulation system

Fig. 6. Schematic of a femtosecond laser micromachining system

Fig. 7. The structure of silicone rubber thin film fiber optic acoustic sensor

Fig. 8. The production process of silicone rubber film

Fig. 9. Cantilever structure silicone rubber thin film

Fig. 10. Spectrum measurement setup for micro-cantilever fiber optic acoustic sensing

Fig. 11. Interference spectrum of the micro-cantilever fiber optic acoustic sensor

Fig. 12. Experimental setup for fiber optic acoustic sensing system

Fig. 13. Frequency response characteristic curve of micro-cantilever cantilever fiber optic acoustic sensor

Fig. 14. Sound pressure response of the micro-cantilever fiber optic acoustic sensor

Fig. 15. The signal-to-noise ratio curve of micro-cantilever fiber optic acoustic sensor

Fig. 16. Frequency response characteristic curve of micro-cantilever cantilever with a thickness of 12 μm

Fig. 17. Sound pressure response of the micro-cantilever with a thickness of 12 μm