Research on the control model of piezoelectric micropositioning actuator

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 10, Issue 6, 602(2002)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

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References(5)

[1] [1] Sun L N, Zhang T, Cai H G. Study of micro/nano positioning system[A]. Proceeding of the 2nd Asia-Europe Congress on Mechatronics[C]. Kitakyushu, Fukuoka, Japan, 1998:486-490.

[2] [2] Galinaitis W S, Rogers R C. Compensation for hysteresis using bivariate preisach models[J]. SPIE, 1997, 3039:538-547.

[3] [3] Venkataraman R, Krishnaprasad P S. A novel algorithm for the invention of the preisach operator[J]. SPIE, 2000, 3984:404-414.

[4] [4] Ge P, Jouaneh M. Tracking control of a piezoceramic actuator[J]. IEEE Transactions on Control System Technology, 1996, 4(3):209-216.

[5] [5] Leigh T, Zimmerman D. An implicit method for the nolinear modeling and simulation of piezoceramic actuators displaying hysteresis[J]. Smart Structures and Material, 1991,AMD-123:57-63.

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[2] CHEN Yuan-sheng, QIU Jin-hao, JI Hong-li, LE BRETON Ronan. Modeling and inverse control of Preisach type hysteresis nonlinearity using hyperbola functions[J]. Optics and Precision Engineering, 2013, 21(5): 1205

[3] ZHAO Xue-zeng, LI Ning, ZHOU Fa-quan, Li Hong-bo. Influence factors of line edge roughness measured by AFM[J]. Optics and Precision Engineering, 2009, 17(4): 839

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the control model of piezoelectric micropositioning actuator[J]. Optics and Precision Engineering, 2002, 10(6): 602

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Paper Information

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Received: Apr. 17, 2002

Accepted: --

Published Online: Sep. 18, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology