Chinese Optics Letters, Volume. 11, Issue 8, 080501(2013)
Grating imaging scanning lithography
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Bin Yu, Wei Jia, Changhe Zhou, Hongchao Cao, Wenting Sun. Grating imaging scanning lithography[J]. Chinese Optics Letters, 2013, 11(8): 080501
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Received: Mar. 18, 2013
Accepted: May. 13, 2013
Published Online: Jul. 19, 2013
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