Optics and Precision Engineering, Volume. 24, Issue 11, 2746(2016)
Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros
Get Citation
Copy Citation Text
ZHUANG Xu-ye, YU Lei, WANG Xin-long, LI Ping-hua, L Dong-feng, GUO Qun-ying. Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros[J]. Optics and Precision Engineering, 2016, 24(11): 2746
Category:
Received: May. 7, 2016
Accepted: --
Published Online: Dec. 26, 2016
The Author Email: ZHUANG Xu-ye (zxye8888@hotmail.com)