Journal of Applied Optics, Volume. 40, Issue 4, 658(2019)

Research on on-line correction technology of ruled grating curved error

YANG Chao1...2, ZHOU Peng1,2, ZHOU Runsen1, GAO Xu1,2, and XUE Changxi12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(15)

    [1] [1] HUTLEY M C. Diffraction grating[M].London: Academic Press, 1982: 42-73.

    [2] [2] YANG Q H. Compact high-resolution Littrow conical diffraction spectrometer[J].Applied Optics, 2016, 55(18): 4801-4807.

    [3] [3] JITSUNO T, MOTOKOSHI S, OKAMOTO T, et al. Development of 91 cm size gratings and mirrors for LEFX laser system[J]. Journal of Physics: Conference Series, 2008, 112(3):1-4.

    [5] [5] WANG Han, LI Shuifeng, LIU Xiuying, et al. Optical structure of miniature spectrometer[J]. Journal of Applied Optics, 2008, 29(2): 230-233.

    [7] [7] GAO B, CHEN T, KHUAT V, et al. Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching[J]. Chinese Optics Letters, 2016, 14(2): 021407.

    [8] [8] YANG Chao, YU Haili, ZHANG Shanwen, et al. Active control technology to correct the quality of the grating wave-front[J]. Chinese Journal of Lasers, 2015, 42(1): 231-238.

    [9] [9] HARRISON G R, STURGIS N, DAVIS S P, et al. Interferometrically controlled ruling of ten-inch diffraction gratings[J]. Journal of the Optical Society of America, 1959, 49(3): 205-211.

    [10] [10] STROKE G W. Attainment of high-resolution gratings by ruling under interferometric control[J]. Journal of the Optical Society of America, 1961, 51(12): 1321-1339.

    [11] [11] LI Xiaotian, BAYAN Heshig, QI Xiangdong,et al.Influence and revising method of machine-ruling grating line’s curve error, location error on plane grating’ performance[J]. Chinese Journal of Lasers, 2013,40(3): 227-234.

    [12] [12] HARRISON G R, THOMPSON S W, KAZUKONIS H, et al. 750-mm ruling engine producing large gratings and echelles[J]. Journal of the Optical Society of America, 1972, 62(6): 751-756.

    [13] [13] STROKE G W. Attainment of high-resolution gratings by ruling under interferometric control[J]. Journal of the Optical Society of America, 1961, 51(12): 1321-1339.

    [14] [14] YU H L, LI X T, ZHU J W, et al. Reducing the line curvature error of mechanically ruled gratings by interferometric control[J]. Applied Physics B, 2014, 117(1): 279-286.

    [15] [15] MI Xiaotao, YU Haili, YU Hongzhu, et al. Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control[J]. Applied Optics, 2017,56(21): 5857-5864.

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    YANG Chao, ZHOU Peng, ZHOU Runsen, GAO Xu, XUE Changxi. Research on on-line correction technology of ruled grating curved error[J]. Journal of Applied Optics, 2019, 40(4): 658

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    Paper Information

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    Received: Dec. 3, 2018

    Accepted: --

    Published Online: Nov. 5, 2019

    The Author Email:

    DOI:10.5768/jao201940.0403005

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