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Acta Optica Sinica, Volume. 34, Issue 2, 214003(2014)

Technical Study on Beam Smoothing of High Power Excimer Laser MOPA System

Wang Dahui*, Zhao Xueqing, Xue Quanxi, Zhang Yongsheng, Hu Yun, Zhu Yongxiang, Yi Aiping, and Zhao Jun
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    Wang Dahui, Zhao Xueqing, Xue Quanxi, Zhang Yongsheng, Hu Yun, Zhu Yongxiang, Yi Aiping, Zhao Jun. Technical Study on Beam Smoothing of High Power Excimer Laser MOPA System[J]. Acta Optica Sinica, 2014, 34(2): 214003

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jul. 26, 2013

    Accepted: --

    Published Online: Jan. 23, 2014

    The Author Email: Dahui Wang (chsslw@163.com)

    DOI:10.3788/aos201434.0214003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology