Acta Photonica Sinica, Volume. 49, Issue 1, 0124002(2020)
Preparation and Light Trapping Properties of Two-dimensional AZO Gratings on Metal Aluminum Back Contact
Figures & Tables(10)
Fig. 1. Al膜上二维AZO光栅的AFM形貌和横截面扫描曲线AFM morphologies and cross section scanning curves of 2-D AZO gratings on aluminum film
Fig. 2. 槽深均为228的不同周期二维AZO光栅SEM图片SEM images of 2-D AZO gratings with 228 nm height and different periods
Fig. 3. 槽深均为228 nm的不同周期二维AZO光栅反射光谱Reflective spectrum of 2-D AZO gratings with 228 nm height and different periods
Fig. 6. 背电极结构(300 nm Al膜+80 nm AZO膜+AZO光栅)示意图Sketch map of back electrode structure (300 nm Al film +80 nm AZO film + AZO grating)
Fig. 7. 槽深均为228 nm的不同周期二维AZO光栅反射光谱的理论曲线Reflective spectrum theoretical curves of 2-D AZO gratings with 228 nm height and different periods
Fig. 8. 周期为1 250 nm槽深为228 nm AZO光栅的双向反射分布函数实验与模拟曲线比较.Comparing experiment and simulation BRDF data of AZO grating with 1 250 nm period and 228 nm height
Table 1. The total reflectivity, specular reflectivity, diffuse reflectivity and haze in the range 400~1 100 nm of AZO gratings with 228 nm height and different periods
View tableView in ArticleTable 1. The total reflectivity, specular reflectivity, diffuse reflectivity and haze in the range 400~1 100 nm of AZO gratings with 228 nm height and different periods
Period Total Specular Diffuse Haze 0 nm 0.76 0.76 0.0 0.0 624 nm 0.59 0.47 0.13 0.22 815 nm 0.63 0.43 0.20 0.32 986 nm 0.65 0.36 0.29 0.45 1 250 nm 0.67 0.36 0.31 0.46
Table 2. The theoretical and experimental results of total and specular reflectivity of AZO gratings with 228 nm height at 400~11 00 nm
View tableView in ArticleTable 2. The theoretical and experimental results of total and specular reflectivity of AZO gratings with 228 nm height at 400~11 00 nm
Reflectivity P =624 nm815n m 986 nm 1 250 nm Total Theoretical 69 74 76 79 Experimental 59 63 65 67 Specular Theoretical 46 41 28 23 Experimental 47 43 36 36
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Ren-chen LIU, Jing LU, Ang LI, Juan DING, Wei QUAN. Preparation and Light Trapping Properties of Two-dimensional AZO Gratings on Metal Aluminum Back Contact[J]. Acta Photonica Sinica, 2020, 49(1): 0124002
Paper Information
Received: Sep. 9, 2019
Accepted: Oct. 8, 2019
Published Online: Mar. 19, 2020
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