Acta Photonica Sinica, Volume. 49, Issue 1, 0124002(2020)

Preparation and Light Trapping Properties of Two-dimensional AZO Gratings on Metal Aluminum Back Contact

Ren-chen LIU1... Jing LU1, Ang LI1, Juan DING1 and Wei QUAN2 |Show fewer author(s)
Author Affiliations
  • 1Zhuhai College of Jilin University, Zhuhai, Guangdong 519041, China
  • 2College of Communication Engineering, Jilin University, Changchun 130012, China
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    To discuss the preparation and reflective spectral properties of two-dimensional aluminum-doped zinc oxide (ZnO:Al) gratings on back contact mental Al, a thickness of 80 nm ZnO:Al thin film was deposited on 300 nm Al substrate, then a layer of AZ5206 photo-resist was spin coated on ZnO:Al thin film. Mask pattern was acquired with 325 nm laser holographic lithography. Using lift off technology, two-dimensional ZnO:Al gratings with 624~1 250 nm periods and 100~300 nm heights on Al substrate were acquired. Grating periods and heights could be regulated independently. Surface morphologies were observed by atomic force microscopy and scanning electron microscopy, reflection spectrum was tested using spectrophotometer with integrating sphere, bidirectional reflectance distribution function was measured by scattering instrument. Results showed that total reflectivity, diffuse reflectivity and haze of those gratings with 228 nm heights all increased obviously as periods increasing from 624 nm to 986 nm. As periods increasing from 986 nm to 1 250 nm, the increment of total, diffuse reflectivity and haze were only small. The tested results of bidirectional reflectance distribution functions further confirmed the above conclusions, namely more large periods, more large diffuse reflectivity peak value, and more peak position numbers. It was concluded that back contact ZnO:Al grating with 986 nm period and 228 nm height had excellent scattering effects, such as the percentage of diffuse reflectivity to total reflectivity was up to 45%.

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    Ren-chen LIU, Jing LU, Ang LI, Juan DING, Wei QUAN. Preparation and Light Trapping Properties of Two-dimensional AZO Gratings on Metal Aluminum Back Contact[J]. Acta Photonica Sinica, 2020, 49(1): 0124002

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    Paper Information

    Received: Sep. 9, 2019

    Accepted: Oct. 8, 2019

    Published Online: Mar. 19, 2020

    The Author Email:

    DOI:10.3788/gzxb20204901.0124002

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