Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning

Xin Li; Tong Zhang; Lingfei Ji; Litian Zhang

doi:10.3788/LOP202259.0114005

Laser & Optoelectronics Progress, Volume. 59, Issue 1, 0114005(2022)

Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning

Xin Li^1,2, Tong Zhang^1,2, Lingfei Ji^1,2、*, and Litian Zhang^1,2

Author Affiliations

¹Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

²Key Laboratory of Trans-Scale laser Manufacturing Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China

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Xin Li, Tong Zhang, Lingfei Ji, Litian Zhang. Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0114005

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Paper Information

Category: Lasers and Laser Optics

Received: Mar. 19, 2021

Accepted: Apr. 21, 2021

Published Online: Dec. 23, 2021

The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)

DOI:10.3788/LOP202259.0114005

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology