Acta Optica Sinica, Volume. 24, Issue 7, 869(2004)
The Developing Threshold Method for Precise Profile Control of Microlens Array with High Numerical Aperture
Get Citation
Copy Citation Text
Dong Xiaochun, Du Chunlei. The Developing Threshold Method for Precise Profile Control of Microlens Array with High Numerical Aperture[J]. Acta Optica Sinica, 2004, 24(7): 869