Progress in efficient doping of Al-rich AlGaN

Jiaming Wang; Fujun Xu; Lisheng Zhang; Jing Lang; Xuzhou Fang; Ziyao Zhang; Xueqi Guo; Chen Ji; Chengzhi Ji; Fuyun Tan; Xuelin Yang; Xiangning Kang; Zhixin Qin; Ning Tang; Xinqiang Wang; Weikun Ge; Bo Shen

doi:10.1088/1674-4926/45/2/021501

Journal of Semiconductors, Volume. 45, Issue 2, 021501(2024)

Progress in efficient doping of Al-rich AlGaN

Jiaming Wang¹, Fujun Xu^1、*, Lisheng Zhang^1,2, Jing Lang¹, Xuzhou Fang¹, Ziyao Zhang¹, Xueqi Guo¹, Chen Ji¹, Chengzhi Ji¹, Fuyun Tan¹, Xuelin Yang¹, Xiangning Kang¹, Zhixin Qin^1,2, Ning Tang^1,3,4, Xinqiang Wang^1,3,4, Weikun Ge¹, and Bo Shen^1,3,4、**

Author Affiliations

¹State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China

²Beijing SinoGaN Semiconductor Technology Co., Ltd., Beijing 101399, China

³Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China

⁴Collaborative Innovation Center of Quantum Matter, Beijing 100871, China

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Jiaming Wang, Fujun Xu, Lisheng Zhang, Jing Lang, Xuzhou Fang, Ziyao Zhang, Xueqi Guo, Chen Ji, Chengzhi Ji, Fuyun Tan, Xuelin Yang, Xiangning Kang, Zhixin Qin, Ning Tang, Xinqiang Wang, Weikun Ge, Bo Shen. Progress in efficient doping of Al-rich AlGaN[J]. Journal of Semiconductors, 2024, 45(2): 021501

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Paper Information

Category: Articles

Received: Aug. 22, 2023

Accepted: --

Published Online: Apr. 24, 2024

The Author Email: Xu Fujun (FJXu), Shen Bo (BShen)

DOI:10.1088/1674-4926/45/2/021501

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