Acta Optica Sinica, Volume. 40, Issue 2, 0212001(2020)
Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field
[1] Zhou L, Wang Z H, Sun D C et al. Present situation and development of modern precision measurement technology[J]. Chinese Journal of Scientific Instrument, 38, 1869-1878(2017).
[2] Guan J, Köchert P, Weichert C et al. A high performance one-dimensional homodyne encoder and the proof of principle of a novel two-dimensional homodyne encoder[J]. Precision Engineering, 37, 865-870(2013).
[3] Zhao S S, Hou C L, Zhang J et al. A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique[J]. Measurement Science and Technology, 23, 105102(2012).
[6] Grotjohann T, Testa I, Leutenegger M et al. Diffraction-unlimited all-optical imaging and writing with a photochromic GFP[J]. Nature, 478, 204-208(2011).
[8] Su Y R, Wang Q, Yan F B et al. Subdivision error analysis and compensation for photoelectric angle encoder in a telescope control system[J]. Mathematical Problems in Engineering, 2015, 967034(2015).
[9] Sun Q[J]. Progress and technical features of absolute grating with high precision World Manufacturing Engineering & Market, 2012, 72-73.
[10] Soref R A, de Leonardis F, Passaro V M N et al. On-chip digital Fourier-transform spectrometer using a thermo-optical Michelson grating interferometer[J]. Journal of Lightwave Technology, 36, 5160-5167(2018).
[14] Ye S L, Zhang Q, Zhu W B. Study on quadrature error real-time compensation for grating moiré signal[J]. Chinese Journal of Scientific Instrument, 38, 57-64(2017).
[16] Zhu G, Zhang C, Fu M et al. Developement of alternating light field space-time coupling type displacement measuring system[J]. Optics and Precision Engineering, 25, 2011-2022(2017).
Get Citation
Copy Citation Text
Ge Zhu, Zhiwei Pu, Min Fu, Changli Li, Xiaoyu Yu, Shuangya Zhang. Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field[J]. Acta Optica Sinica, 2020, 40(2): 0212001
Category: Instrumentation, Measurement and Metrology
Received: Jul. 18, 2019
Accepted: Sep. 9, 2019
Published Online: Jan. 2, 2020
The Author Email: Fu Min (fum_0@cqut.edu.cn)