Acta Optica Sinica, Volume. 40, Issue 2, 0212001(2020)
Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field
To resolve the issues of poor consistency, large volume, and difficult integration for a multi-alternating light source, a precise linear displacement measurement method for micro-controlled phase shift is proposed based on the electric traveling wave synthetized from the standing wave of single-alternating light field, herein. The proposed method uses a single-alternating light source and the spatial modulation of a four-channel sinusoidal grid to obtain four-channel light intensity signals, resulting in two-channel standing wave signals with a strict phase difference of 90° by the micro-controlled phase-shifting circuit. A one-channel traveling wave signal is synthesized from the two-channel standing wave signals. Finally, the phase difference between the reference signal and the electric traveling wave signal is interpolated by a high-frequency clock pulse to realize a displacement measurement. In addition, the principle of micro-controlled phase-shifting measurement is analyzed, the theoretical and simulation models of phase-shifting accuracy and light-field distribution are established, and the causes of primary and secondary errors introduced by phase-shifting accuracy and light-field distribution of the sensor are clarified. Experimental results demonstrate an original measurement accuracy of ±0.26 μm for the prototype in a short period of 0.6 mm; after applying error correction and optimization, the resultant measurement accuracy is basically similar to that of the RENISHAW laser interferometer over a measurement range of 500 mm. This integrated structure and high-precision measurement results provide a solid foundation for future engineering applications of these sensors.
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Ge Zhu, Zhiwei Pu, Min Fu, Changli Li, Xiaoyu Yu, Shuangya Zhang. Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field[J]. Acta Optica Sinica, 2020, 40(2): 0212001
Category: Instrumentation, Measurement and Metrology
Received: Jul. 18, 2019
Accepted: Sep. 9, 2019
Published Online: Jan. 2, 2020
The Author Email: Fu Min (fum_0@cqut.edu.cn)