Journal of Applied Optics, Volume. 43, Issue 4, 772(2022)

PSD analysis and control strategy of optical component polishing

Zhibin WANG... Yao TIAN, Pengcheng SUN, Zheng ZHANG, Feng ZHANG, Yunlong ZHANG and Mingyin JIAO |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(12)
    Effect of random profile amplitude on PSD curves
    Effect of random profile frequency on PSD curves
    Effect of random profile phase on PSD curves
    Effect of random frequency and amplitude decrease on PSD curves
    Generated six curves of random profile
    Relationship between PSD curves with RMS and RMS Slope
    Diagram of several typical NC machining paths
    PSD curve with spiral path
    PSD curve analysis with grid line path
    PSD curve with pseudorandom path
    PSD curve with Peano path
    • Table 1. Evaluation parameters of six curves of random profile with RMS approximation

      View table
      View in Article

      Table 1. Evaluation parameters of six curves of random profile with RMS approximation

      参数名称曲线编号
      123456
      RMS/mm0.01370.01370.01360.01390.01380.0137
      RMSSlope0.49150.25610.09920.05740.02560.013
      自相关长度/mm0.04760.09710.212520.507551.08262.1067
      PSD曲线拟合斜率−3.56145−3.97554−4.29558−4.47599−4.57322−4.6028
    Tools

    Get Citation

    Copy Citation Text

    Zhibin WANG, Yao TIAN, Pengcheng SUN, Zheng ZHANG, Feng ZHANG, Yunlong ZHANG, Mingyin JIAO. PSD analysis and control strategy of optical component polishing[J]. Journal of Applied Optics, 2022, 43(4): 772

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: OPTICAL ELEMENT AND FABRICATION

    Received: Apr. 6, 2022

    Accepted: --

    Published Online: Aug. 10, 2022

    The Author Email:

    DOI:10.5768/JAO202243.0405004

    Topics