Fig. 1. Laser differential confocal uniformity of the inner and outer radius and shell thickness measurement principle of an ICF capsule.

Fig. 2. Measurement errors introduced by the eccentricity, e, of the capsule.

Fig. 3. Axial resolution curve, Δu, for different NAs of objective lens.

Fig. 4. Sketch map of the measurement system.

Fig. 5. The established measurement system.

Fig. 6. Differential confocal curves of the points A, B, and O.

Fig. 7. Repeated measurements of the outer radius, R.

Fig. 8. Repeated measurements of the shell thickness, T.

Fig. 9. Repeated measurements of the inner radius, r.

Fig. 10. Repeated measurements of the outer radius uniformity.

Fig. 11. Repeated measurements of the shell thickness uniformity.

Fig. 12. Repeated measurements of the inner radius uniformity.