Chinese Journal of Quantum Electronics, Volume. 21, Issue 4, 456(2004)
Study on discharge circuit of excimer laser
[1] [1] Dirk Basting. Excimer laser technology [Z]. Published by Lambda Physik, 2001, ISBN3-00-006395-1.
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[in Chinese], [in Chinese], [in Chinese]. Study on discharge circuit of excimer laser[J]. Chinese Journal of Quantum Electronics, 2004, 21(4): 456