[1] [1] CUI C X, FENG Q B, ZHANG B. Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system［J］. Applied Optics, 2015, 54(11): 3122-3131.

[2] [2] GAO W, HUANG P S, YAMADA T, et al.. A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers［J］. Precision Engineering, 2002, 26(4): 396-404.

[3] [3] LIU X Y, ZHOU ZH F, ZHANG ZH L, et al.. Calibration of inclinometer parameters in digital zenith camera［J］. Opt. Precision Eng., 2016, 24(9): 2325-2331. (in Chinese)

[4] [4] WANG X J, CAO Y, ZHOU K. Methods of monocular pose measurement based on planar objects［J］. Opt. Precision Eng., 2017, 25(1): 274-280. (in Chinese)

[5] [5] FAN K C, WANG T H, LIN S Y, et al.. Design of a dual-axis optoelectronic level for precision angle measurements［J］. Measurement Science and Technology, 2011, 22(5): 055302.

[6] [6] FAN K C, WANG T H, LIU Y C, et al.. Development of a dual-axis optoelectronic precision level［J］. Proceedings of SPIE-The International Society for Optical Engineering, 2011, 8321:83213H.

[7] [7] CHENG F, FAN K C. High-resolution angle measurement based on michelson interferometry［J］. Physics Procedia, 2011, 19: 3-8.

[8] [8] WANG B G. Study on a new high accuracy dual-axis electronic level［J］. Acta Metrologica Sinica, 1998, 19(1): 22-27.

[9] [9] SUN G Y, GAO L M, BAI J M, et al.. High accuracy three-dimensional attitude angle measuring device［J］. Opt. Precision Eng., 2016, 24(5): 963-970. (in Chinese)

[10] [10] ZHAO ZH Q, YE D, ZHANG X, et al.. Calibration of area-array camera parameters based on improved exact measuring angle method［J］. Opt. Precision Eng., 2016, 24(7): 1592-1599. (in Chinese)

[11] [11] DING J SH, SHI G Q, SHI G F. Grating ruling platform leveling device based on image clarity measurement［J］. Opt. Precision Eng., 2016, 24(4): 819-825. (in Chinese)

[12] [12] YANG ZH G, ZHOU J, HUANG H, et al.. Analysis and compensation of angle errors of polarization navigation sensors［J］. Opt. Precision Eng., 2014, 22(6): 1424-1429. (in Chinese)

[13] [13] HUANG M ZH. Study on position sensitive detector［D］. Hangzhou: Zhejiang University, 2001. (in Chinese)

[14] [14] AN Y Y, ZENG X D. Principle of Photoelectric Detector［M］. Xi’an: Xidian University Press, 2004. (in Chinese)