[1] [1] SUN L N, RONG W B, QIU D SH, et al.. Research on a large travel and high resolution rotary micro2driver based on micro-manipulation ［J］. Opt. Precision Eng., 2001, 9(6):514-519. (in Chinese)

[2] [2] LAI Z L, LIU X D, GENG J, et al.. Sliding mode control of hysteresis of piezoceramic actuator based on inverse preisach compensation ［J］. Opt. Precision Eng., 2011, 19(6):1281-1290.

[3] [3] ZHANG D, ZHANG CH J, WEI Q, et al.. Sliding mode control of hysteresis of piezoceramic actuator based on inverse preisach compensation ［J］. Opt. Precision Eng., 2012, 20(3):577-586. (in Chinese)

[4] [4] MAYERGOYZ I D. Mathematical Model of Hysteresis ［M］. New York: Springer, 1991.

[5] [5] GE P, JOUANEH M. Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators ［J］. Precision Engineering,1997, 20(2):99-111.

[6] [6] JIA H G. Study on Feed Forward Control Method to Micro Positioning System Driven by PZT Basing on Non-equi-ration Model ［D］. Changchun:Changchun Institue of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2000.(in Chinese)

[7] [7] GOLDFARB M, CELANOVIC N. Modeling piezoelec- tric stack actuators for control of micromanipulation ［J］. IEEE, 1997, 17 (3):69-79.

[8] [8] BANNING R, KONIN G W L, ADRIAENS H J, et al.. State space analysis and identification for a class of hysteretic systems ［J］. Automatica, 2001, 37(12):1883- 1892.

[9] [9] BIN Y, YANG D CH, CHEN N N, et al.. Analysis and modeling of a novel piezo-actuated electromechanical coupling dynamic system ［J］. Electric Machines and Control,2008, 12(2):179-185. (in chinese)

[10] [10] ZHU M, HUANG ZH H, WANG X J, et al.. Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation ［J］. Opt. Precision Eng., 2011, 19(4):844-849. (in Chinese)

[11] [11] ZHANG B, WANG J W, CHEN K, et al.. Study on the hysteresis property of piezoelectric actuator ［J］. China Mechanical Engineering, 2002, 13(5):446-450.

[12] [12] KOOPS R, SAWATZKY G A. New scanning device for scanning tunneling microscope applications ［J］. Review of Scientific Instruments, 1992, 63 (8): 4008-4009.

[13] [13] NEWCOMB CV, FLINN I. Improving the linearity of piezoelectric ceramic actuators ［J］. Electronics Letters, 1982, 18(11):442-444.

[14] [14] RIFAIO M E, AUMOND B D, TOMI K Y. Imaging at the nano-scale ［C］. Proceedings 2003 IEEE/ A SME International Conference, Monterey , California, 2003: 715-722.

[15] [15] FAN W, YU X F. Study on PZT actuator creep characteristics ［J］. Chinese Journal of Scientific Instrument, 2006, 27(11):1383-1387.

[16] [16] XIAO X L, ZHANG CH J. A compensating scheme for hysteresis and creep in atomic force microscope scanner ［J］. Journal of Fuzhou University (Natural Science), 2008, 36(9):4-8.

[17] [17] CROFT D,SHED G,DEVASIA S. Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application ［J］. Journal of Dynamic Systems, Measurement, and Control, 2001,123:35-43, March.

[18] [18] HEWON J, GWEON D G. Creep characteristics of piezoelectric actuators ［J］. Review of Scientific Instruments,2000, 71(4):1896-2000.

[19] [19] HEWON J,JONG Y S,GWEON D G. New open-loop actuating method of piezoelectric actuators for removing hysteresis and creep ［J］. Review of Scientific Instruments, 2000, 71(9):3436-3451.