Acta Photonica Sinica, Volume. 39, Issue 11, 2045(2010)
Shape Measurement Based on Phaseshifting Electronic Speckle Pattern Interferometry
In order to obtain accurate measurement of 3D shape, a shape measurement method using phaseshifting electronic speckle pattern interferometry(ESPI) is proposed. A carrier pattern on the object surface is produced by electronic speckle pattern interferometry. The carrier pattern is curved because of the modulation of the altitude of the object surface, which causes the changes of the phase of the carrier pattern. Then the phase changes of the object surface can be extracted by phaseshifting algorithms. Finally the shape of the object surface can be derived by the relationship between the phase changes and the altitude of the surface. The principle of the proposed method is introduced. Surface of a small ball is tested using the method. The experimental results prove that the phaseshifting electronic speckle pattern interferometry is useful for the measurement of an object surface,and indicate that the method has the virtue of high sensitivity because the carrier pattern is produced by electronic speckle pattern interferometry.
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ZHAO Ruidong, SUN Ping. Shape Measurement Based on Phaseshifting Electronic Speckle Pattern Interferometry[J]. Acta Photonica Sinica, 2010, 39(11): 2045
Received: May. 18, 2010
Accepted: --
Published Online: Dec. 7, 2010
The Author Email: Ping SUN (sunpingmail@163.com)
CSTR:32186.14.