Chinese Journal of Quantum Electronics, Volume. 32, Issue 3, 3640370(2015)
Growth conditions of Cu thin-films grown by CVD using kinetic Monte Carlo simulation
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LI Peng, YANG Zhenxiong, ZHAO Hu. Growth conditions of Cu thin-films grown by CVD using kinetic Monte Carlo simulation[J]. Chinese Journal of Quantum Electronics, 2015, 32(3): 3640370
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Received: Sep. 23, 2014
Accepted: --
Published Online: May. 29, 2015
The Author Email: Peng LI (lipeng@mail.bnu.edu.cn)
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