Optics and Precision Engineering, Volume. 29, Issue 11, 2622(2021)

Angle error compensation of precision reducer tester

Zu-rong QIU*... Lei ZHOU, Jie XUE and Zhen YU |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin300072, China
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    Figures & Tables(12)
    Angle measuring system of precision reducer tester
    Schematic diagram of embedded control and signal acquisition system
    Experimental setup for calibration of angle measurement error
    Flow chart of automatic calibration
    Operation interface of automatic calibration system
    Angle measurement error data and harmonic compensation curve
    Angle measurement error model obtained by training point and harmonic neural network combined compensation method
    Comparison of residuals between error harmonic method and harmonic neural network combined compensation method
    Schematic diagram of autocollimator cross line tilt
    Data drift of autocollimator in X-axis
    • Table 1. Amplitude and phase obtained by error harmonic method

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      Table 1. Amplitude and phase obtained by error harmonic method

      阶次幅值/(″)相位/(°)
      1234512345
      0-0.48-1.15-0.56-1.08-0.7790.0090.0090.0090.0090.00
      10.540.700.580.580.68-55.49-48.22-62.46-53.58-59.87
      21.571.391.411.301.3395.2098.81103.7795.74101.36
      30.20-0.280.11-0.150.22-38.6255.49-51.409.5563.09
      4-0.53-0.440.33-0.54-0.44-33.05-68.9074.81-66.18-65.83
      5-0.180.010.120.220.0916.4476.4030.46-75.672.04
      60.380.420.440.440.3560.3443.5952.2195.1050.46
      70.03-0.190.20-0.40-0.08-56.21-53.814.63-75.21-45.64
      80.630.570.760.630.59-46.74-75.38-47.13-36.71-78.52
      90.240.140.210.20-0.18-16.7356.57-90.62-15.6436.60
      10-0.34-0.24-0.30-0.370.0340.93-11.4730.6050.2226.42
      11-0.25-0.240.14-0.02-0.0920.42-35.8631.21-10.0112.17
    • Table 2. Angle measurement error before and after compensation of verification points

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      Table 2. Angle measurement error before and after compensation of verification points

      序号圆光栅角位置/(°)未补偿测角误差/(″)谐波法补偿后/(″)谐波-神经网络组合法补偿后/(″)
      18.170.000.000.00
      223.17-1.66-0.80-0.13
      338.17-1.530.13-0.09
      453.18-2.52-0.83-0.48
      568.18-2.49-0.66-0.66
      683.18-1.750.69-0.59
      798.18-2.120.33-0.24
      8113.17-2.66-1.29-0.38
      9128.17-0.51-0.16-0.23
      10143.17-0.59-0.46-0.32
      11158.18-0.35-0.51-0.84
      12173.171.891.02-0.34
      13188.180.89-0.02-0.29
      14203.18-0.70-0.51-0.28
      15218.18-1.220.06-0.33
      16233.18-1.580.050.03
      17248.18-2.54-0.45-0.78
      18263.18-2.090.920.10
      19278.18-3.010.26-0.42
      20293.18-3.47-1.08-0.11
      21308.18-1.500.01-0.10
      22323.17-1.79-0.44-0.09
      23338.18-1.38-0.34-0.45
      24353.181.301.520.02
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    Zu-rong QIU, Lei ZHOU, Jie XUE, Zhen YU. Angle error compensation of precision reducer tester[J]. Optics and Precision Engineering, 2021, 29(11): 2622

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: May. 25, 2021

    Accepted: --

    Published Online: Dec. 10, 2021

    The Author Email: QIU Zu-rong (qzr@tju.edu.cn)

    DOI:10.37188/OPE.20212911.2622

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