Fig. 1. Cross-section diagram of the SPAD

Fig. 2. TCAD simulation results. (a) I-V characteristic curves; (b) 2D electric field profile

Fig. 3. Block diagram of single photon dTOF detector

Fig. 4. TDC readout circuit structure

Fig. 5. Measurement principle of the TDC

Fig. 6. Chip and test setup. (a) Micrograph of the chip ; (b) test platform

Fig. 7. I-V DC characteristic curves

Fig. 8. Test results of DCR and afterpulsing probability. (a) DCR versus excess voltage at different temperatures; (b) afterpulsing probability versus excess voltage at room temperature

Fig. 9. PDP as a function of photon wavelength

Fig. 10. Comparison of PDP and DCR properties for different SPADs at 905 nm

Fig. 11. Transfer curve of the TDC

Fig. 12. Nonlinear errors of the TDC. (a) DNL curve; (b) INL curve

Fig. 13. Dynamic characteristics test. (a) Transient output waveform; (b) sing-shot precision