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Acta Optica Sinica, Volume. 29, Issue 3, 702(2009)

Dual-Grating-Based Nanometer Measurement

Zhou Shaolin1,2、*, Yang Yong1,2, Chen Wangfu1,2, Yan Wei1, Ma Ping1, Jiang Wenbo1,2, Hu Song1, and Tang Xiaoping1
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    Zhou Shaolin, Yang Yong, Chen Wangfu, Yan Wei, Ma Ping, Jiang Wenbo, Hu Song, Tang Xiaoping. Dual-Grating-Based Nanometer Measurement[J]. Acta Optica Sinica, 2009, 29(3): 702

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 30, 2008

    Accepted: --

    Published Online: Mar. 17, 2009

    The Author Email: Shaolin Zhou (xiangyayong@163.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology