Optics and Precision Engineering, Volume. 25, Issue 10, 2706(2017)

Removal functions of different polishing heads worked in planet motion model

YAO Yong-sheng1、*, MA Zhen1, XU Liang1, DING Jiao-teng1, WANG Yong-jie1, SHEN Le1, and JIANG Bo1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    To obtain Gaussian-like removal function in optical manufacturing process, a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10, the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method, which verifies the correctness of the proposed method.The proposed method was used to derive polishing removal functions of different polishing heads.By computer simulation, it shows that type Ⅱ petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally, the type Ⅱ petal polishing head was polished, and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10, the test and simulation results are consistent with each other and they are all close to the Gaussian curve.These test result verifies the correctness of the proposed method again.

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    YAO Yong-sheng, MA Zhen, XU Liang, DING Jiao-teng, WANG Yong-jie, SHEN Le, JIANG Bo. Removal functions of different polishing heads worked in planet motion model[J]. Optics and Precision Engineering, 2017, 25(10): 2706

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    Paper Information

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    Received: Feb. 20, 2017

    Accepted: --

    Published Online: Nov. 24, 2017

    The Author Email: Yong-sheng YAO (ganglangyao@126.com)

    DOI:10.3788/ope.20172510.2706

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