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Acta Optica Sinica, Volume. 41, Issue 2, 0212005(2021)

Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase

Wenqian Lu, Jianxin Li*, Mingliang Duan, Yixuan Xu, and Yi Zong
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
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    Article index updated: Jun. 5, 2024

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    Wenqian Lu, Jianxin Li, Mingliang Duan, Yixuan Xu, Yi Zong. Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase[J]. Acta Optica Sinica, 2021, 41(2): 0212005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 17, 2020

    Accepted: Aug. 28, 2020

    Published Online: Feb. 27, 2021

    The Author Email: Li Jianxin (ljx@vip.163.com)

    DOI:10.3788/AOS202141.0212005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology