Acta Optica Sinica, Volume. 41, Issue 2, 0212005(2021)

Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase

Wenqian Lu, Jianxin Li*, Mingliang Duan, Yixuan Xu, and Yi Zong
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
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    Environmental vibrations introduce random tilt and phase-shifting errors in interferometric measurement, which reduce the accuracy of the final measurements. To reduce the influence of these vibrations, this article proposes anti-vibration interferometric shape measurement based on tilt phase. First, the interferograms are Fourier-transformed into the frequency domain. Next, the peak coordinates are located at subpixel precision by a frequency-domain subdivision operation and the vibration tilt plane is extracted. Finally, the phase distribution is extracted by a least-squares algorithm. Experimental results show that the phase distributions retrieved by the method are highly consistent with those obtained by the simultaneous phase-shifting interferometry, with very small deviations of the peak-to-valley and root mean square values. Moreover, the method does not need to modify the hardware, and can provide a low-cost, high-precision solution for phase-shifting interferometry under vibration environment.

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    Wenqian Lu, Jianxin Li, Mingliang Duan, Yixuan Xu, Yi Zong. Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase[J]. Acta Optica Sinica, 2021, 41(2): 0212005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 17, 2020

    Accepted: Aug. 28, 2020

    Published Online: Feb. 27, 2021

    The Author Email: Li Jianxin (ljx@vip.163.com)

    DOI:10.3788/AOS202141.0212005

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