Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors

Fengli Wang; Zhanshan Wang; Jingtao Zhu; Zhong Zhang; Wenjuan Wu; Shumin Zhang; Lingyan Chen

Chinese Optics Letters, Volume. 4, Issue 9, 550(2006)

Fengli Wang^*, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen

Author Affiliations

Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092

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[2] Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu, "Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range," Chin.Opt.Lett. 9, 023102 (2011)

[3] Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen, "Intrinsic stress analysis of sputtered carbon film," Chin.Opt.Lett. 6, 384 (2008)

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Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen, "Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors," Chin.Opt.Lett. 4, 550 (2006)

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Paper Information

Received: Feb. 27, 2006

Accepted: --

Published Online: Sep. 14, 2006

The Author Email: Fengli Wang (wangzs@mail.tongji.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology