Chinese Optics Letters, Volume. 4, Issue 9, 550(2006)

Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors

Fengli Wang*, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen
Author Affiliations
  • Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092
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    Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen. Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors[J]. Chinese Optics Letters, 2006, 4(9): 550

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    Paper Information

    Received: Feb. 27, 2006

    Accepted: --

    Published Online: Sep. 14, 2006

    The Author Email: Fengli Wang (wangzs@mail.tongji.edu.cn)

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