Spectroscopy and Spectral Analysis, Volume. 31, Issue 11, 2891(2011)
Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy
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LI Shou-zhe, WU Qi, XU Mao-chun, LI Hong, WANG Yong-xing. Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy[J]. Spectroscopy and Spectral Analysis, 2011, 31(11): 2891
Paper Information
Received: Nov. 30, 2010
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Shou-zhe LI (lisz@dlut.edu.cn)
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