Opto-Electronic Engineering, Volume. 43, Issue 4, 61(2016)
Affine Transformation Optimal Matching Parameter Calculation Formula of Real-time Overlay Alignment
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LIU Ziqiang, LEI Liang, LIU Xin, WANG Qi, YAN Runming, ZHOU Jinyun. Affine Transformation Optimal Matching Parameter Calculation Formula of Real-time Overlay Alignment[J]. Opto-Electronic Engineering, 2016, 43(4): 61
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Received: Aug. 17, 2015
Accepted: --
Published Online: May. 11, 2016
The Author Email: Ziqiang LIU (822132032@qq.com)
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