Fig. 1. Self-traceable grating structure image. (a) 2D plane image; (b) 3D structural image

Fig. 2. Schematic diagram of hBN/self-traceable grating structure

Fig. 3. (a) nano-FTIR spectra of hBN/self-traceable grating structure; (b) nano-FTIR spectra of hBN/self-traceable grating structure at the grating ridge and grating groove

Fig. 4. (a) Sample testing equipment, BRUKER Company’s nanoscale infrared spectrometer Anasys nanoIR3-s, with 10 nm spatial resolution; (b) Near-field optical imaging of the sample, where the blue color represents the region of the hBN/self-traceable grating structure, and the yellow color represents the region of the self-traceable grating; (c) Atomic Force Microscopy imaging of the surface structure of the sample

Fig. 5. A comparative study of AFM and SNOM images of hBN/grating composite structures with different scanning ranges. (a)-(c) AFM imaging of the sample surface morphology (The imaging sizes are 1 µm×1 µm, 5 µm×5 µm, and 10 µm×10 µm, respectively); (d)-(f) Near-field optical imaging of the sample corresponding to the previous images (The imaging sizes are the same as mentioned above)