Acta Optica Sinica, Volume. 29, Issue 6, 1719(2009)
Modification of Porous Silica Antireflective Coatings with Fluorine-Containing Organosilicon
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Zhang Qinghua, Yang Wei, Ma Hongju, Ma Ping, Xu Qiao. Modification of Porous Silica Antireflective Coatings with Fluorine-Containing Organosilicon[J]. Acta Optica Sinica, 2009, 29(6): 1719