Optics and Precision Engineering, Volume. 15, Issue 7, 1084(2007)
Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers[J]. Optics and Precision Engineering, 2007, 15(7): 1084
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