Journal of the Chinese Ceramic Society, Volume. 50, Issue 5, 1385(2022)
Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
DANG Kun, WANG Hua, CHEN Weiqian, LI Yuhong, XU Shipeng. Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films[J]. Journal of the Chinese Ceramic Society, 2022, 50(5): 1385
Paper Information
Category:
Received: May. 21, 2021
Accepted: --
Published Online: Nov. 23, 2022
The Author Email:
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20