Photonics Research, Volume. 10, Issue 1, 214(2022)
Silicon mode-loop Mach-Zehnder modulator with L-shaped PN junction for 0.37 V·cm VπL high-efficiency modulation
Fig. 1. Schematic structure of the ML-MZM.
Fig. 2. (a) Operating principle of the proposed modulator; (b) cross section structure of the modulator arms.
Fig. 3. (a) Top view of the designed ADC mode converter; (b) simulated electric field of ADC; (c) calculated CE and XT of the mode converter.
Fig. 4. (a) Refractive index variations for
Fig. 5. Optical microscope image of (a) the fabricated ML-MZM, (b) the mode converter, (c) MMI.
Fig. 6. (a) Transmission spectra of the ML-MZM under different reverse voltages; (b) extracted phase change as a function of bias voltage.
Fig. 7. (a) Microscope image of the ML-MZM with 1 mm phase shifter; (b) microscope image of the normal MZM with 2 mm phase shifter; (c) normal MZM transmission spectrum under various reverse voltages.
Fig. 8. Measured EO-S21 response at
Fig. 9. (a) Schematic diagram of the high-speed measurement setup; (b) OOK eye diagram at 10 Gb/s; (c) OOK eye diagram at 15 Gb/s; (d) measured SNR response and bit allocation of 40 Gb/s DMT signal; (e) measured BER curve of 40 Gb/s DMT signal; (f) received constellations of four typical subcarriers of the DMT signal.
Fig. 10. Optical modulation spectra of the modulator at different RF sinusoidal frequencies.
Fig. 11. Calculated EO response of ML-MZM with 1 and 0.5 mm phase shifter length.
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Jiacheng Liu, Gangqiang Zhou, Jiangbing Du, Weihong Shen, Linjie Zhou, Zuyuan He. Silicon mode-loop Mach-Zehnder modulator with L-shaped PN junction for 0.37 V·cm VπL high-efficiency modulation[J]. Photonics Research, 2022, 10(1): 214
Category: Integrated Optics
Received: Sep. 15, 2021
Accepted: Nov. 8, 2021
Published Online: Dec. 20, 2021
The Author Email: Jiangbing Du (dujiangbing@sjtu.edu.cn)