Photonics Research, Volume. 10, Issue 1, 214(2022)

Silicon mode-loop Mach-Zehnder modulator with L-shaped PN junction for 0.37 V·cm VπL high-efficiency modulation

Jiacheng Liu1、†, Gangqiang Zhou1、†, Jiangbing Du1,2、*, Weihong Shen1, Linjie Zhou1, and Zuyuan He1,2
Author Affiliations
  • 1State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2Peng Cheng Laboratory, Shenzhen 518055, China
  • show less
    Figures & Tables(12)
    Schematic structure of the ML-MZM.
    (a) Operating principle of the proposed modulator; (b) cross section structure of the modulator arms.
    (a) Top view of the designed ADC mode converter; (b) simulated electric field of ADC; (c) calculated CE and XT of the mode converter.
    (a) Refractive index variations for TE0 and TE1 modes as a function of reverse bias for lateral PN junction. TE0 mode overlap with lateral PN junction of (b) single-mode waveguide and (c) two-mode waveguide. (d) Refractive index variations for TE0 and TE1 modes as a function of reverse bias for L-shaped PN junction. TE0 mode overlap with L-shaped PN junction of (e) single-mode waveguide and (f) two-mode waveguide.
    Optical microscope image of (a) the fabricated ML-MZM, (b) the mode converter, (c) MMI.
    (a) Transmission spectra of the ML-MZM under different reverse voltages; (b) extracted phase change as a function of bias voltage.
    (a) Microscope image of the ML-MZM with 1 mm phase shifter; (b) microscope image of the normal MZM with 2 mm phase shifter; (c) normal MZM transmission spectrum under various reverse voltages.
    Measured EO-S21 response at −3 V bias voltage.
    (a) Schematic diagram of the high-speed measurement setup; (b) OOK eye diagram at 10 Gb/s; (c) OOK eye diagram at 15 Gb/s; (d) measured SNR response and bit allocation of 40 Gb/s DMT signal; (e) measured BER curve of 40 Gb/s DMT signal; (f) received constellations of four typical subcarriers of the DMT signal.
    Optical modulation spectra of the modulator at different RF sinusoidal frequencies.
    Calculated EO response of ML-MZM with 1 and 0.5 mm phase shifter length.
    • Table 1. Performance Comparison of Carrier-Depletion-Based Silicon Interferometric Modulator

      View table
      View in Article

      Table 1. Performance Comparison of Carrier-Depletion-Based Silicon Interferometric Modulator

      ReferenceStructureOperation BandBandwidth (GHz)VπL (V·cm)Speed (Gb/s)
      [11]MZMC-band14.70.5164
      [12]MZMO-band130.4624
      [13]MZMC-band2.60.6210
      [14]MZMC-band120.8110
      [16]MIMC-band120.8630
      [15]MIMC-band11.30.7240
      [17]MIMC-band120.9540
      This workML-MZMC-band50.3740
    Tools

    Get Citation

    Copy Citation Text

    Jiacheng Liu, Gangqiang Zhou, Jiangbing Du, Weihong Shen, Linjie Zhou, Zuyuan He. Silicon mode-loop Mach-Zehnder modulator with L-shaped PN junction for 0.37 V·cm VπL high-efficiency modulation[J]. Photonics Research, 2022, 10(1): 214

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Integrated Optics

    Received: Sep. 15, 2021

    Accepted: Nov. 8, 2021

    Published Online: Dec. 20, 2021

    The Author Email: Jiangbing Du (dujiangbing@sjtu.edu.cn)

    DOI:10.1364/PRJ.442699

    Topics