High Power Laser and Particle Beams, Volume. 36, Issue 9, 091001(2024)
Predictive modeling of the surface pattern of double-sided polishing process of optical components
Figures & Tables(13)
Fig. 2. Sketch of the relationship between the motion of the down-throwing disc and the element
Fig. 3. Sketch of the relationship between the movement of the up-throwing disc and the element
Fig. 4. Schematic diagram of the position of the upper disk swinging back and forth versus time
Fig. 5. Stress distribution on the lower surface of the upper polishing disk element of 300 mm diameter
Fig. 7. Distribution of pressure on the surface of the element at different moments
Fig. 9. Comparison between the predicted and the experimentally processed surface patterns
Fig. 10. Distribution of prediction and machined surface pattern errors
Table 1. Coefficients of pressure distribution equation
View tableView in ArticleTable 1. Coefficients of pressure distribution equation
p00 p10 p01 p20 p11 p02 p30 p21 0.1528 − 0.002813 − 0.002813 2.042×10−5 5.041×10−5 2.044×10−5 −6.455×10−8 −1.173×10−7 p12 p03 p40 p31 p22 p13 p04 −1.172×10−7 −6.47×10−8 7.503×10−11 3.041×10−14 2.727×10−10 −1.021×10−13 7.528×10−11
Table 2. Polishing process parameters in the modified experiment
View tableView in ArticleTable 2. Polishing process parameters in the modified experiment
experimental group number element, upper plate, lower plate/(r·mm−1) oscillation speed/ (mm·s−1) time/s swing distance/ mm distance from the center of the element to the center of the lower plate/mm 1 10.1，10.9，10 5/6 2700 10 1260 2 12.1，12.9，10 5/6 1800 3 12.1，12.9，10 1/3 300 4 10.1，10.9，10 1/3 420
Table 3. Prediction-validated expermental process parameters and comparsion between experimental data predicted data
View tableView in ArticleTable 3. Prediction-validated expermental process parameters and comparsion between experimental data predicted data
experimental group number element, upper plate, lower plate/(r·mm−1) oscillation speed/ (mm·s−1) time/s swing distance/ mm distance from the center of the element to the center of the lower plate/mm experimental PV values/μm predicted PV values/μm 1# 12.1, 12.9, 10 5/6 2700 80 0, 1160 2.145 2.122 2# 12.1, 12.9, 10 2 900 10 0, 1160 1.149 1.122 3# 10.1, 10.9, 8 1/3 600 10 0, 1260 0.527 0.566 4# 10.1, 10.9, 10 1/3 1800 10 0, 1260 0.962 0.947 5# 10.1, 10.9, 10 2 3600 10 110, 1160 1.720 1.746
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Zhikai Mi, Fengming Nie, Siling Huang, Feng Xue. Predictive modeling of the surface pattern of double-sided polishing process of optical components[J]. High Power Laser and Particle Beams, 2024, 36(9): 091001
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Received: Feb. 29, 2024
Accepted: May. 9, 2024
Published Online: Oct. 15, 2024
The Author Email: Nie Fengming (nfm2006@sina.com)
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