Acta Photonica Sinica, Volume. 40, Issue 9, 1342(2011)

Fabrication and Electrical Properties of Highly Preferred Orientation Mo Thin Film by DC Magnetron Sputtering

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    References(14)

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication and Electrical Properties of Highly Preferred Orientation Mo Thin Film by DC Magnetron Sputtering[J]. Acta Photonica Sinica, 2011, 40(9): 1342

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    Paper Information

    Received: Apr. 6, 2011

    Accepted: --

    Published Online: Oct. 11, 2011

    The Author Email: (wangzhendong@ncu.edu.cn)

    DOI:10.3788/gzxb20114009.1342

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