Acta Physica Sinica, Volume. 69, Issue 10, 107202-1(2020)

Corrosion and tribological properties of TiAlCN/TiAlN/TiAlcomposite system deposited by magneticfliter cathode vacuum arctechnique

Shu-Nian Chen1, Bin Liao1、*, Lin Chen2, Zhi-Qiang Zhang1, Yong-Qing Shen1, Hao-Qi Wang1, Pan Pang2, Xian-Ying Wu1, Qing-Song Hua1, and Guang-Yu He3
Author Affiliations
  • 1Key Laboratory of Beam Technology of Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China
  • 2Beijing Radiation Center, Beijing 100875, China
  • 3Science and Technology on Plasma Dynamics Laboratory, Air Force Engineering University, Xi’an 710038, China
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    Figures & Tables(18)
    The schematic diagram of the FCVA deposition system.
    Distribution of the layers in the coating.
    Thecrosssection of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2:(a) 0 sccm; (b) 10 sccm; (c) 15 sccm
    XRD diffractogram of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    Raman spectra of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    XPS analysis of S3: (a) N 1s;(b) C 1s;(c) Ti 2p; (d) Al 2p.
    Potentiodynamic polarization curves of TiAlCN/TiAlN/TiAl coatings in 3.5 wt-% NaCl solution.
    Results of Electrochemical corrosion characterization activities for TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    Electrochemical impedance spectroscopy of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    Bode plots ofTiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    Bode phase angle plots ofTiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    SEM surface micrographs of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2: (a)0 sccm; (b)10 sccm; (c)15 sccm.
    Friction coefficient curves of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    Friction coefficientand wear rate of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    SEM micrographs of the wear track and EDS results of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2: (a), (b) 0 sccm; (c), (d) 10 sccm; (e), (f) 15 sccm.
    Raman spectra of wear track of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.
    • Table 1.

      Chemical composition of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.

      不同C2H2流量沉积的TiAlCN/TiAlN/TiAl涂层的元素相对含量

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      Table 1.

      Chemical composition of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.

      不同C2H2流量沉积的TiAlCN/TiAlN/TiAl涂层的元素相对含量

      SampleC2H2/sccm Ti/at.%Al/at.%N/at.%C/at.%
      TiAlN/TiAlS1030.8722.8546.28
      TiAlCN/TiAlN/TiAlS21028.6421.5241.238.61
      TiAlCN/TiAlN/TiAlS31527.6022.9537.0712.39
    • Table 2.

      Microhardness、Modules and ratio of H/E of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.

      不同C2H2流量沉积的TiAlCN/TiAlN/TiAl涂层的显微硬度、杨氏模量和H/E比值

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      Table 2.

      Microhardness、Modules and ratio of H/E of TiAlCN/TiAlN/TiAl coatings deposited at various C2H2.

      不同C2H2流量沉积的TiAlCN/TiAlN/TiAl涂层的显微硬度、杨氏模量和H/E比值

      SampleC2H2/sccm E/GPa H/GPa H/E
      TiAlN/TiAlS10290.2030.530.105
      TiAlCN/TiAlN/TiAlS210310.6541.160.133
      TiAlCN/TiAlN/TiAlS315316.1444.360.140
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    Shu-Nian Chen, Bin Liao, Lin Chen, Zhi-Qiang Zhang, Yong-Qing Shen, Hao-Qi Wang, Pan Pang, Xian-Ying Wu, Qing-Song Hua, Guang-Yu He. Corrosion and tribological properties of TiAlCN/TiAlN/TiAlcomposite system deposited by magneticfliter cathode vacuum arctechnique[J]. Acta Physica Sinica, 2020, 69(10): 107202-1

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    Paper Information

    Received: Jan. 3, 2020

    Accepted: --

    Published Online: Nov. 30, 2020

    The Author Email:

    DOI:10.7498/aps.69.20200012

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