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Optics and Precision Engineering, Volume. 20, Issue 3, 587(2012)

Modeling and control of piezo-stage using neural networks

ZHANG Dong1...2,*, ZHANG Cheng-jin3, WEI Qiang2,4, TIAN Yan-bing1, ZHAO Jing-bo1 and LI Xian-ming3 |Show fewer author(s)
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  • 1[in Chinese]
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  • 4[in Chinese]
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    ZHANG Dong, ZHANG Cheng-jin, WEI Qiang, TIAN Yan-bing, ZHAO Jing-bo, LI Xian-ming. Modeling and control of piezo-stage using neural networks[J]. Optics and Precision Engineering, 2012, 20(3): 587

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    Received: Sep. 1, 2011

    Accepted: --

    Published Online: Apr. 16, 2012

    The Author Email: Dong ZHANG (zhangdonggraduate@163.com)

    DOI:10.3788/ope.20122003.0587

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology