Acta Physica Sinica, Volume. 69, Issue 14, 146101-1(2020)

Application of Ge50Te50/Zn15Sb85 nanocomposite multilayer films in high thermal stability and low power phase change memory

Xiao-Qin Zhu and Yi-Feng Hu*
Author Affiliations
  • School of Mathematics and Physics, Jiangsu University of Technology, Changzhou 213001, China
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    The Ge50Te50/Zn15Sb85 nanocomposite multilayer films are prepared by the magnetron sputtering. The variation of resistance with temperature and with crystallization activation energy is studied. The multilayer structure of the section before and after the crystallization for Ge50Te50/Zn15Sb85 nanocomposite multilayer film is compared by transmission electron microscope. The phase change memory device based on [GT(7nm)/ZS(3nm)]5 is manufactured, and the electrical performance is measured. The fast switching speed, low operating power consumption, and good cycling performance are achieved for Ge50Te50/Zn15Sb85. Ge50Te50/Zn15Sb85, which is a kind of nanocomposite multilayer film, a promising phase change storage material with high thermal stability and low power consumption.

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    Xiao-Qin Zhu, Yi-Feng Hu. Application of Ge50Te50/Zn15Sb85 nanocomposite multilayer films in high thermal stability and low power phase change memory [J]. Acta Physica Sinica, 2020, 69(14): 146101-1

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    Paper Information

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    Received: Apr. 6, 2020

    Accepted: --

    Published Online: Dec. 28, 2020

    The Author Email:

    DOI:10.7498/aps.69.20200502

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