Photonics Research, Volume. 9, Issue 5, 839(2021)

Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser On the Cover

Yuchan Zhang1, Qilin Jiang1, Kaiqiang Cao1, Tianqi Chen1, Ke Cheng1, Shian Zhang1, Donghai Feng1, Tianqing Jia1,2、*, Zhenrong Sun1, and Jianrong Qiu3
Author Affiliations
  • 1State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200062, China
  • 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
  • 3State Key Laboratory of Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
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    References(36)

    [1] M. Huang, F. Zhao, Y. Cheng, N. Xu, Z. Xu. Origin of laser-induced near subwavelength ripples: interference between surface plasmons and incident laser. ACS Nano, 3, 4062-4070(2009).

    [2] J. Bonse, A. Rosenfeld, J. Krüger. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses. J. Appl. Phys., 106, 104910(2009).

    [3] T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, H. Kuroda. Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses. Phys. Rev. B, 72, 125429(2005).

    [4] A. Y. Vorobyev, C. Guo. Direct femtosecond laser surface nano/microstructuring and its applications. Laser Photon. Rev., 7, 385-407(2013).

    [5] A. Y. Vorobyev, C. Guo. Colorizing metals with femtosecond laser pulses. Appl. Phys. Lett., 92, 041914(2008).

    [6] H. Oh, J. Lee, M. Seo, I. U. Baek, J. Y. Byun, M. Lee. Laser-induced dewetting of metal thin films for template-free plasmonic color printing. ACS Appl. Mater. Interfaces, 10, 38368-38375(2018).

    [7] J. Huang, L. Jiang, X. Li, Q. Wei, Z. Wang, B. Li, L. Huang, A. Wang, Z. Wang, M. Li, L. Qu, Y. Lu. Cylindrically focused nonablative femtosecond laser processing of long-range uniform periodic surface structures with tunable diffraction efficiency. Adv. Opt. Mater., 7, 1900706(2020).

    [8] K. Cao, L. Chen, H. Wu, J. Liu, K. Cheng, Y. Li, Y. Xia, C. Feng, S. Zhang, D. Feng, Z. Sun, T. Jia. Large-area commercial-grating-quality subwavelength periodic ripples on silicon efficiently fabricated by gentle ablation with femtosecond laser interference via two cylindrical lenses. Opt. Laser Technol., 131, 106441(2020).

    [9] R. Drevinskas, M. Beresna, J. Zhang, A. G. Kazanskii, P. G. Kazansky. Ultrafast laser-induced metasurfaces for geometric phase manipulation. Adv. Opt. Mater., 5, 1600575(2017).

    [10] T. Zou, B. Zhao, W. Xin, Y. Wang, B. Wang, X. Zheng, H. Xie, Z. Zhang, J. Yang, C. Guo. High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse. Light Sci. Appl., 9, 69(2020).

    [11] A. S. Alnaser, S. A. Khan, R. A. Ganeev, E. Stratakis. Recent advances in femtosecond laser-induced surface structuring for oil–water separation. Appl. Sci., 9, 1554(2019).

    [12] L. Yong, F. Chen, Q. Yang, Z. Jiang, X. Hou. A review of femtosecond-laser-induced underwater superoleophobic surfaces. Adv. Mater. Interfaces, 5, 1701370(2018).

    [13] J. E. Sipe, J. F. Young, J. S. Preston, H. M. van Driel. Laser-induced periodic surface structure. I. Theory. Phys. Rev. B, 27, 1141-1154(1983).

    [14] J. Bonse, S. Graef. Maxwell meets Marangoni—a review of theories on laser-induced periodic surface structures. Laser Photon. Rev., 14, 2000215(2020).

    [15] L. Jiang, A. Wang, B. Li, T. Cui, Y. Lu. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light Sci. Appl., 7, 17134(2017).

    [16] S. A. Jalil, J. Yang, M. ElKabbash, S. C. Singh, C. Guo. Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams. Appl. Surf. Sci., 471, 516-520(2019).

    [17] J. Huang, L. Jiang, X. Li, A. Wang, Z. Wang, Q. Wang, J. Hu, L. Qu, T. Cui, Y. Lu. Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification. Nanophotonics, 8, 869-878(2019).

    [18] M. Yang, Q. Wu, Z. Chen, B. Zhang, B. Tang, J. Yao, I. D. Olenik, J. Xu. Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse. Opt. Lett., 39, 343-346(2014).

    [19] K. Cheng, J. Liu, K. Cao, L. Chen, Y. Zhang, Q. Jiang, D. Feng, S. Zhang, Z. Sun, T. Jia. Ultrafast dynamics of single-pulse femtosecond laser-induced periodic ripples on the surface of a gold film. Phys. Rev. B, 98, 184106(2018).

    [20] K. Cheng, K. Cao, Y. Zhang, R. Han, D. Feng, J. Liu, S. Zhang, Z. Sun, T. Jia. Ultrafast dynamics of subwavelength periodic ripples induced by single femtosecond pulse: from noble to common metals. J. Phys. D, 53, 285102(2020).

    [21] J. M. Liu. Simple technique for measurements of pulsed Gaussian-beam spot sizes. Opt. Lett., 7, 196-198(1982).

    [22] A. M. Weiner, D. E. Leaird, G. P. Wiederrecht, K. A. Nelson. Femtosecond pulse sequences used for optical manipulation of molecular motion. Science, 247, 1317-1319(1990).

    [23] A. M. Weiner. Femtosecond pulse shaping using spatial light modulators. Rev. Sci. Instrum., 71, 1929-1960(2000).

    [24] A. Lindinger, C. Lupulescu, M. Plewicki, F. Vetter, A. Merli, S. M. Weber, L. Wöste. Isotope selective ionization by optimal control using shaped femtosecond laser pulses. Phys. Rev. Lett., 93, 033001(2004).

    [25] J. Liu, X. Jia, W. Wu, K. Cheng, D. Feng, S. Zhang, Z. Sun, T. Jia. Ultrafast imaging on the formation of periodic ripples on a Si surface with a prefabricated nanogroove induced by a single femtosecond laser pulse. Opt. Express, 26, 6302-6315(2018).

    [26] C. Kerse, H. Kalaycıoğlu, P. Elahi, B. Çetin, D. K. Kesim, Ö. Akçaalan, S. Yavaş, M. D. Aşık, B. Öktem, H. Hoogland, R. Holzwarth, F. Ö. Ilday. Ablation-cooled material removal with ultrafast bursts of pulses. Nature, 537, 84-88(2016).

    [27] H. Wu, Y. Jiao, C. Zhang, C. Chen, L. Yang, J. Li, J. Ni, Y. Zhang, C. Li, Y. Zhang, S. Jiang, S. Zhu, Y. Hu, D. Wu, J. Chu. Large area metal micro-/nano-groove arrays with both structural color and anisotropic wetting fabricated by one-step focused laser interference lithography. Nanoscale, 11, 4803-4810(2019).

    [28] J. Schindelin, C. T. Rueden, M. C. Hiner, K. W. Eliceiri. The ImageJ ecosystem: an open platform for biomedical image analysis. Mol. Reprod. Dev., 82, 518-529(2015).

    [29] X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, Z. R. Sun. Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging. J. Appl. Phys., 115, 143102(2014).

    [30] K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. Linde. Transient states of matter during short pulse laser ablation. Phys. Rev. Lett., 81, 224-227(1998).

    [31] C. V. Shank, R. Yen, C. Hirlimann. Time-resolved reflectivity measurements of femtosecond-optical-pulse-induced phase transitions in silicon. Phys. Rev. Lett., 50, 454-457(1983).

    [32] S. K. Sundaram, E. Mazur. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses. Nat. Mater., 1, 217-224(2002).

    [33] G. D. Tsibidis, M. Barberoglou, A. Loukakos, E. Stratakis, C. Fotakis. Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in subablation conditions. Phys. Rev. B, 86, 115316(2012).

    [34] N. Zhang, X. Zhu, J. Yang, X. Wang, M. Wang. Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum. Phys. Rev. Lett., 99, 167602(2007).

    [35] C. Pan, Q. Wang, J. Sun, F. Wang, J. Sun, G. Wang, Y. Lu, L. Jiang. Dynamics and its modulation of laser-induced plasma and shockwave in femtosecond double-pulse ablation of silicon. Appl. Phys. Express, 13, 012006(2020).

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    Yuchan Zhang, Qilin Jiang, Kaiqiang Cao, Tianqi Chen, Ke Cheng, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, Jianrong Qiu. Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser[J]. Photonics Research, 2021, 9(5): 839

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    Paper Information

    Category: Ultrafast Optics

    Received: Jan. 11, 2021

    Accepted: Mar. 4, 2021

    Published Online: May. 7, 2021

    The Author Email: Tianqing Jia (tqjia@phy.ecnu.edu.cn)

    DOI:10.1364/PRJ.418937

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