Fig. 1. Schematic diagram of material processed by femtosecond laser scanning

Fig. 2. Single pulse time distribution

Fig. 3. Periodic femtosecond pulsed laser Gaussian distribution

Fig. 4. Scanning path planning

Fig. 5. Laser scan path function. (a) x-direction; (b) y-direction

Fig. 6. Temperature variation curves of electron lattice at different energy densities. (a) 4.34 J/cm²; (b) 5.78 J/cm²

Fig. 7. Electron lattice temperature accumulation at different energy densities for 20 pulses. (a) 4.34 J/cm²; (b) 5.78 J/cm²

Fig. 8. Energy accumulation intensity distribution in x and y directions at different scanning speeds. (a) x-direction; (b) y-direction

Fig. 9. Energy accumulation intensity distribution of different scanning intervals

Fig. 10. Femtosecond laser processing of face gears

Fig. 11. Super depth of field measuring instrument

Fig. 12. Schematic diagram of ablation morphology at different scanning speeds. (a) High scanning speed; (b) low scanning speed

Fig. 13. Ablation morphologies at different scanning speeds. (a) 110 mm/s; (b) 150 mm/s; (c) 200 mm/s; (d) 300 mm/s

Fig. 14. Ablation morphologies at different scanning speeds. (a) 100 mm/s; (b) 120 mm/s

Fig. 15. Ablation morphologies at different energy densities. (a) 4.34 J/cm²; (b) 5.78 J/cm²

Fig. 16. Ablation morphologies of different scanning intervals. (a) 9 μm; (b) 12 μm; (c) 15 μm; (d) 18 μm

Fig. 17. Surface roughness of ablated material with different parameters. (a) Energy density is 1.66 J/cm², interval is 5 μm; (b) energy density is 1.66 J/cm², interval is 10 μm; (c) energy density is 1.34 J/cm², interval is 5 μm; (d) energy density is 1.34 J/cm², interval is 10 μm