Semiconductor Optoelectronics, Volume. 43, Issue 3, 466(2022)
Design of Novel Vertical GaNBased Trench Gate MOSFET with Electric Field Shielding Function of Gate Dielectric
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LI Chenglang, WU Qianshu, ZHOU Yuhao, ZHANG Jinwei, LIU Zhenxing, ZHANG Qi, LIU Yang. Design of Novel Vertical GaNBased Trench Gate MOSFET with Electric Field Shielding Function of Gate Dielectric[J]. Semiconductor Optoelectronics, 2022, 43(3): 466
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Received: Jun. 2, 2022
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Published Online: Aug. 1, 2022
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