Optics and Precision Engineering, Volume. 16, Issue 9, 1582(2008)

Determination of optical constants for aluminum thin film based on combined optimal algorism

JIN Wei-hua1...2,*, JIN Chun-shui1, ZHANG Li-Chao1, ZHU Hong-li1,2, and LIU Lei12 |Show fewer author(s)
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    References(9)

    [2] [2] ALEKSANDAR D R.Algorithm for the determination of intrinsic optical constants of metal films:application to aluminum[J].Applied Optics,1995,34(22):4755-4767

    [3] [3] SCHULZ L G.An interferometric method for the determination of the absorption coefficients of metals,with results for silver and aluminum[J].J.Opt.Soc.Am.,1951,41(12):1047-1050

    [4] [4] LARRUQUERT J I,MENDEZ J A,AZNAREZ J A.Far-ultraviolet reflectance measurements and optical constants of unoxidized aluminum films[J].Applied Optics,1995,34(22):4892-4899

    [5] [5] ERIC K L,JANUSZ J,MARK N.In-situ ellipsometric measurements of thin film aluminum oxidation[J].SPIE,4099:218-227

    [8] [8] DOBROWOLSKI J A,HO F C,WALDORF A.Determination of optical constants of thin film coating materials based on inverse synthesis[J].Applied Optics,1983,22(20):3191-3195

    [9] [9] VRIENS L,RIPPENS W.Optical constants of absorbing thin solid films on a substrate[J].Applied Optics,1983,22(24):4105-4110

    [10] [10] NGUYEN H V,COLLINS R W.Optical functions of discontinuous aluminum films-intraband and interband contributions to particle resonance absorption[J].J.Opt.Soc.Am.A.,1993,10(3):515-511

    [11] [11] OUGHADDOU H,VIZZINI S,AUFRAY B,et al..Growth and oxidation of aluminum thin films deposited on Ag (111)[J].Appl.Surf.Sci.,2006,252:4167-4170

    [12] [12] JIN W H,JIN CH SH,ZHU H L,et al..The determination of optical constants of zirconia and silica thin films in the UV to visible range[J].SPIE,2007,6722:67220T-67226T

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    [2] Shang Peng, Xiong Shengming, Li Linghui, Tian Dong. Optical Constants and Properties of Dual-Ion-Beam Sputtering Ta2O5/SiO2 Thin Film by Spectroscopy[J]. Acta Optica Sinica, 2014, 34(5): 531002

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    JIN Wei-hua, JIN Chun-shui, ZHANG Li-Chao, ZHU Hong-li, LIU Lei. Determination of optical constants for aluminum thin film based on combined optimal algorism[J]. Optics and Precision Engineering, 2008, 16(9): 1582

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    Paper Information

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    Received: Feb. 22, 2008

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Wei-hua JIN (jin.weihua@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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