[1] [1] Kumar S, Tong Z and Jiang X Q 2022 Advances in the design and manufacturing of novel freeform optics Int. J. Extrem. Manuf.4 032004

[2] [2] Fang F Z, Zhang X D, Gao W, Guo Y B, Byrne G and Hansen H N 2017 Nanomanufacturing—perspective and applications CIRP Ann.66 683–705

[3] [3] Yuan J L, Lyu B H, Hang W and Deng Q F 2017 Review on the progress of ultra-precision machining technologies Front. Mech. Eng.12 158–80

[4] [4] Wang J S, Fang F Z, An H J, Wu S, Qi H M, Cai Y X and Guo G Y 2023 Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales Int. J. Extrem. Manuf.5 012005

[5] [5] Fang F Z, Lai M, Wang J S, Luo X C, Yan J W and Yan Y D 2022 Nanometric cutting: mechanisms, practices and future perspectives Int. J. Mach. Tools Manuf.178 103905

[6] [6] Li C Y, Xu M T, Song W J and Zhang H Z 2023 A review of static and dynamic analysis of ball screw feed drives, recirculating linear guideway, and ball screw Int. J. Mach. Tools Manuf.188 104021

[7] [7] Gao W, Ibaraki S, Donmez M A, Kono D, Mayer J R R, Chen Y L, Szipka K, Archenti A, Linares J M and Suzuki N 2023 Machine tool calibration: measurement, modeling, and compensation of machine tool errors Int. J. Mach. Tools Manuf.187 104017

[8] [8] Ding J G, Chang Y, Chen P, Zhuang H, Ding Y Y, Lu H J and Chen Y H 2020 Dynamic modeling of ultra-precision fly cutting machine tool and the effect of ambient vibration on its tool tip response Int. J. Extrem. Manuf.2 025301

[9] [9] Elmelegy A and Zahwi S 2023 Comparative study of error determination of machine tools Int. J. Adv. Manuf. Technol.124 4575–602

[10] [10] Jia Z Y, Ma J W, Song D N, Wang F J and Liu W 2018 A review of contouring-error reduction method in multi-axis CNC machining Int. J. Mach. Tools Manuf.125 34–54

[11] [11] Li Z L and Zhu L M 2019 Compensation of deformation errors in five-axis flank milling of thin-walled parts via tool path optimization Precis. Eng.55 77–87

[12] [12] Sato Y and Yan J W 2022 Tool path generation and optimization for freeform surface diamond turning based on an independently controlled fast tool servo Int. J. Extrem. Manuf.4 025102

[13] [13] Li C, Piao Y C, Hu Y X, Wei Z Z, Li L Q and Zhang F H 2021 Modelling and experimental investigation of temperature field during fly-cutting of KDP crystals Int. J. Mech. Sci.210 106751

[14] [14] Xu J, Zhang X F and Zhu F A 2022 Effects of machining parameters on surface morphology of porous bronze during monocrystalline diamond cutting Int. J. Mech. Sci.234 107686

[15] [15] Wang Z, Wang D L, Dong H M and Yu S D 2019 An invariant method updating Abbe principle for accuracy test and error calibration of rotary pairs in machine tools Int. J. Mach. Tools Manuf.141 46–58

[16] [16] Cui Z P, Zhang H J, Zong W J, Li G and Du K 2022 Origin of the lateral return error in a five-axis ultraprecision machine tool and its influence on ball-end milling surface roughness Int. J. Mach. Tools Manuf.178 103907

[17] [17] Huang W H and Yan J W 2023 Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review Int. J. Extrem. Manuf.5 012003

[18] [18] Li C, Hu Y X, Wei Z Z, Wu C J, Peng Y F, Zhang F H and Geng Y Q 2024 Damage evolution and removal behaviors of GaN crystals involved in double-grits grinding Int. J. Extrem. Manuf.6 025103

[19] [19] Lv B R, Lin B, Sui T Y and Liu C Y 2023 Crack extension mechanism and scratch stress field model of hard and brittle materials caused by curvature effect J. Mater. Process. Technol.319 118058

[20] [20] Lv B R, Lin B, Sui T Y, Liu C Y, Zhang J S, Wang L F, Chen X H and Zhou J G 2023 Vibration-assisted material damage mechanism: from indentation cracks to scratch cracks Chin. J. Aeronaut.37 527–46

[21] [21] Zhao L, Zhang J J, Zhang J G, Dai H F, Hartmaier A and Sun T 2023 Numerical simulation of materials-oriented ultra-precision diamond cutting: review and outlook Int. J. Extrem. Manuf.5 022001

[22] [22] He C L, Yan J W, Wang S Q, Zhang S, Chen G and Ren C Z 2023 A theoretical and deep learning hybrid model for predicting surface roughness of diamond-turned polycrystalline materials Int. J. Extrem. Manuf.5 035102

[23] [23] Zhang X Z and Xu Q S 2018 Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage Robot. Comput. Integr. Manuf.54 162–72

[24] [24] Wang X Y, Meng Y X, Huang W W, Li L L, Zhu Z W and Zhu L M 2023 Design, modeling, and test of a normal-stressed electromagnetic actuated compliant nano-positioning stage Mech. Syst. Signal Process.185 109753

[25] [25] Li Z W, Zhang J F, Zheng Z P, Feng P F, Yu D W and Wang J J 2024 Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface Int. J. Extrem. Manuf.6 025102

[26] [26] Zhu Z W, Du H H, Zhou R J, Huang P, Zhu W L and Guo P 2020 Design and trajectory tracking of a nanometric ultra-fast tool servo IEEE Trans. Ind. Electron.67 432–41

[27] [27] Huang P, Wu X Y, To S, Zhu L M and Zhu Z W 2020 Deterioration of form accuracy induced by servo dynamics errors and real-time compensation for slow tool servo diamond turning of complex-shaped optics Int. J. Mach. Tools Manuf.154 103556

[28] [28] Zhou R J, Zhu Z H, Kong L B, Yang X, Zhu L M and Zhu Z W 2022 Development of a high-performance force sensing fast tool servo IEEE Trans. Ind. Inform.18 35–45

[29] [29] Chen W Q, Zheng L, Xie W K, Yang K and Huo D H 2019 Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling J. Mater. Process. Technol.266 339–50

[30] [30] Lv B R, Lin B, Cao Z C, Liu W R and Wang G L 2023 Numerical simulation and experimental investigation of structured surface generated by 3D vibration-assisted milling J. Manuf. Process.89 371–83

[31] [31] Cao H R, Zhang X W and Chen X F 2017 The concept and progress of intelligent spindles: a review Int. J. Mach. Tools Manuf.112 21–52

[32] [32] Han J G, Lin J Q, Li Z G, Lu M M and Zhang J G 2019 Design and computational optimization of elliptical vibration-assisted cutting system with a novel flexure structure IEEE Trans. Ind. Electron.66 1151–61

[33] [33] Lv B R, Lin B, Cao Z C, Li B and Wang G L 2022 A parallel 3-DOF micro-nano motion stage for vibration-assisted milling Mech. Mach. Theory173 104854

[34] [34] Monnin J, Kuster F and Wegener K 2014 Optimal control for chatter mitigation in milling-part 1: modeling and control design Control Eng. Pract.24 156–66

[35] [35] Denkena B and Gmmer O 2012 Process stabilization with an adaptronic spindle system Prod. Eng. Res. Dev.6 485–92

[36] [36] Ramesh R, Mannan M A and Poo A N 2000 Error compensation in machine tools—a review: part I: geometric, cutting-force induced and fixture-dependent errors Int. J. Mach. Tools Manuf.40 1235–56

[37] [37] Ramesh R, Mannan M A and Poo A N 2000 Error compensation in machine tools—a review: part II: thermal errors Int. J. Mach. Tools Manuf.40 1257–84

[38] [38] Ogun P S, Jackson M R and Parkin R M 2013 Mechatronic approach towards surface quality improvement in rotary wood machining Proc. Inst. Mech. Eng. B 227 1266–76

[39] [39] Li H L, Lin B, Sui T Y, Huang T, Liu H T, Yu F K, Zhao P C, Jia Y T and Zhu F A 2022 Local volumetric error calibration of a weak stiffness on-machine measuring device with a new 3-D calibrator Int. J. Adv. Manuf. Technol.121 3613–36

[40] [40] Liang C M, Wang F J, Huo Z C, Shi B C, Tian Y L, Zhao X Y and Zhang D W 2020 A 2-DOF monolithic compliant rotation platform driven by piezoelectric actuators IEEE Trans. Ind. Electron.67 6963–74