Infrared and Laser Engineering, Volume. 48, Issue 2, 221003(2019)

Study on the design and preparing technology of ion beam sputtering wideband absorption thin film

Jiang Yugang1,2、*, Liu Xiaoli3, Liu Huasong1,2, Liu Dandan1,2, Wang Lishuan1,2,4, Chen Dan1,2, Jiang Chenghui1,2, and Ji Yiqin1,2,4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    References(11)

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    [4] [4] Li Zhi, Li Wei, Cai Haihong, et al. Effects of low argon dilution ratio on the nanocrystallization and properties of a-Si:H thin films[J]. Journal of Nanoscience and Nanotechnology, 2010, 10(11): 7667-7670.

    [5] [5] Cui Min, Deng Jinxiang, Li Ting, et al. Study on preparation and spectroscopic ellipsometry of a-Si:H thin films[J]. Vacuum, 2014, 51(2): 48-51. (in Chinese)

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    [7] [7] Liu Huasong, Yang Xiao, Liu Dandan, et al. Physical model of optical contants of SiO2 thin films[J]. Infrared and Laser Engineering, 2017, 46(9): 0921003. (in Chinese)

    [8] [8] Mendeleyev V Ya, Skovorodko S N, Lubnin E N, et al. Optical constants of silicon in near infrared region[J]. Applied Physics Letters, 2008, 93(13): 2994669.

    [9] [9] Wang Lishuan, Yang Xiao, Liu Dandan, et al. Annealing effect of the optical properties of tantalum oxide thin film prepared by ion beam sputtering[J]. Infrared and Laser Engineering, 2018, 47(3): 0321004. (in Chinese)

    [10] [10] Netrvalova M, Prusakova L, Mullerova J, et al. Optical properties of amorphous hydrogenated and microcrystalline silicon films prepared by plasma enhanced chemical vapor deposition and re-crystallized at moderate temperatures[J]. Phys Status Solidi C, 2011, 8(9): 2680-2683.

    [11] [11] Herth E, Desré H, Algré E, et al. Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications[J]. Microelectronics Reliability, 2012, 52(1): 141-146.

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    Jiang Yugang, Liu Xiaoli, Liu Huasong, Liu Dandan, Wang Lishuan, Chen Dan, Jiang Chenghui, Ji Yiqin. Study on the design and preparing technology of ion beam sputtering wideband absorption thin film[J]. Infrared and Laser Engineering, 2019, 48(2): 221003

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    Paper Information

    Category: 先进光学材料

    Received: Sep. 5, 2018

    Accepted: Oct. 15, 2018

    Published Online: Apr. 5, 2019

    The Author Email: Yugang Jiang (liuhuasong@hotmail.com)

    DOI:10.3788/irla201948.0221003

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